Measurement Services

Scientific Computing International offers sample measurement services in its Carlsbad, CA facility. The measurement laboratory is equipped with SCI's state-of-the-art metrology systems that measure reflection, reflection and transmission, multiple angle reflection, spectroscopic ellipsometry, and polarimetry data from the deep UV to NIR. An expert team of PhD level scientists with extensive experience in metrology applications will characterize your samples and provide you with a detailed analysis report. Feel free to contact SCI to discuss your metrology needs.

Applications

FilmTek™ metrology systems can measure a broad array of single and multi-layer films including metallic, semiconductor, amorphous, crystalline, and dielectric materials on virtually any substrate. FilmTek™ systems can simultaneously determine:

Multiple layer thicknesses (from <1Å to 250 microns)

Indices of refraction [ n(l) ] (both TE and TM components of index)

Extinction (absorption) coefficients [ k(l) ]

Anisotropy and birefringence (n_x, n_y, n_z)

Energy band gap [ E_g]

Surface roughness and damage

Porosity, alloy composition, and crystallinity (EMA model)

Film properties versus temperature

Wafer curvature and film stress

Multiple CD parameters (period, line width, trench depth, and sidewall angle)



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