Characterizing Photomasks

FilmTek™ Advantages

  • FilmTek™ 3000 measures reflection and transmission.
  • Simultaneously characterize the photoresist, chrome oxide, and chrome layer thickness.

Photoresist/Cr2O5/Cr/Quartz Substrate

Photom20

Resist Thickness= 3921.0 Å Cr2O5 Thickness= 360.0 Å Chrome Thickness= 736.0 Å