FilmTek™ 4000 Repeatability

FilmTek™ Advantages

  • FilmTek™ 4000 measures thickness and index of refraction independently with SCI’s patented Differential Power Spectral Density (DPSD) technology.
  • Accurate and simultaneous determination of film thickness and index of refraction as a function of wavelength [ n(l) ] (both TE and TM components of index).
  • Best index and thickness repeatability in the industry.

FilmTek™ 4000A Index and Thickness Repeatability: 160 Wafer Load/Unload Cycles

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