Characterizing Oxide Films for Waveguide Applications

FilmTek™ Advantages

  • FilmTek™ 4000 measures thickness and index of refraction independently with SCI’s patented Differential Power Spectral Density (DPSD) technology.
  • Accurate and simultaneous determination of film thickness and index of refraction as a function of wavelength [ n(l) ] (both TE and TM components of index).
  • Measure optical properties from 190nm-1700nm.
  • FilmTek™ 4000 has the highest resolution and repeatability in the industry, with a thickness resolution of 2Å and index resolution of 2×10-5.

6.5µm Ge-SiO2/15µm SiO2/Silicon Substrate

Oxide 33