Characterizing Film Properties versus Temperature
- The high index and thickness resolution of the FilmTek™ 4000 allows film properties to be accurately characterized as a function of temperature.
- Measure dn/dT and thermal expansion coefficients for new materials.
- Thermal characterization of films provides a quick measure of environmental stability for process research and development.
Measured Index of Refraction and Thickness versus Temperature of SiO2 on Silicon