Characterizing Amorphous Silicon and Polysilicon

FilmTek™ Advantages

  • Simultaneous measurement of a-Si thickness, oxide thickness, and a-Si crystallinity.
  • Advanced process control achieved with FilmTek’s™ high resolution measurement of optical constants and thickness.

Amorphous Silicon/Oxide/Silicon

Study of Amorphous Silicon Crystallization Due to Heat Treatment

a-Si.h13

Polysilicon/Oxide/Silicon