FilmTek™ Thin Film Measurement Systems: Spectroscopic Ellipsometers, Reflectometers, Multiple Angle Reflectometers, and Generalized Ellipsometry for Optical CD Measurement



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Metrology Products: Spectroscopic Ellipsometers, Reflectometers, Multiple Angle Reflectometers, and Generalized Ellipsometry for Optical CD Measurement

FilmTek™ spectrophotometry-based metrology systems from Scientific Computing International (SCI) have long set the standards for thin film measurement. Now — our FilmTek™ 4000 Series "raises the bar" by delivering 100 times the resolution of the best non-contact method for thin film measurement, and 10 times the resolution of the best prism coupler contact systems. It's the result of our patented DPSD™ (Differential Power Spectral Density) technique. And it's the latest example of how SCI is leading the thin film measurement field by raising performance to a new level — while offering systems that are truly affordable for virtually every application.

Widest Film Thickness Measurement, Layer, & Spectral Ranges

FilmTek™ metrology systems come in a variety of configurations, and depending on the model can measure reflection, reflection and transmission, multiple angle reflection, spectroscopic ellipsometry, and generalized ellipsometry data. FilmTek™ systems provide peak performance for thin film measurement from very-thin to very-thick films (up to 250 microns). It's achieved by high wavelength resolution detectors combined with low cone angle optical design and apertures to limit measurement spot size. Depending on the films involved, FilmTek™ systems can characterize up to fifteen layers, including film thickness, refractive index, and extinction coefficient. And they all offer a wavelength measurement range from 190 to 1700 nm using our proprietary dispersion model.

Easy-to-Use Spectroscopic Ellipsometers, Reflectometers, and Multiple Angle Reflectometers

Our complete, turn-key systems are designed for simple, efficient, trouble-free push-button operation. The powerful software was designed to put measurements and answers just a click away. And to help characterize and control deposition processes, it includes such capabilities as 2D and 3D contour and surface graphic plotting, a customizable database interface, and the ability to be controlled by a host computer. Versatile, flexible, reliable standard and custom FilmTek™ systems are available in a variety of configurations — from manual table top models, to fully automated systems with robotic cassette transfer and pattern recognition. All are designed for optimum accuracy and repeatability. They're easy to calibrate and operate. And, with features like our unique optical design with no moving parts, they deliver long-lasting, reliable, trouble-free performance.

Affordable Thin Film Measurement Systems for Virtually Every Budget

A variety of configurations are offered in the standard FilmTek™ spectroscopic ellipsometer, reflectometer, and multiple angle reflectometer family. SCI also develops customized models to meet special needs. And they're all priced to fit most budgets.

FilmTek™ 1000 / 1000M / 1500 models are accurate and economical thin film measurement systems for measuring film thickness, refractive index, and extinction coefficient. Collects reflection data at normal incidence in the visible to NIR, and is ideal for film thickness measurement. The FilmTek™ 1500 adds transmission mode measurements to reflection and is ideal for films on transparent substrates.
FilmTek™ 2000 / 2000M / 2000 PAR models augment those thin film measurement capabilities to encompass surface roughness and reflection at normal incidence from deep UV to NIR. Options include optics for small spot size measurements based on a microscope design (FilmTek™ 2000M) or parabolic mirrors (FilmTek™ 2000 PAR).
FilmTek™ 3000 / 3000M / 3000 PAR measures transmission and reflection of films deposited on transparent substrates. These thin film measurement systems are ideally suited for measuring the thickness and optical constants of very thin absorbing films. The FilmTek™ 3000M has a small spot size (40 µm) and can be equipped with a large custom stage for flat panel display applications.
FilmTek™ 2000SE / 3000SE is a high performance spectroscopic ellipsometer that measures from the deep UV to NIR. Based on a rotating compensator design, the FilmTek™ 2000SE spectroscopic ellipsometer combines spectroscopic ellipsometry with normal incidence DUV reflectometry to make it ideally suited for measuring the film thickness and optical constants of very thin films. The FilmTek™ 3000SE spectroscopic ellipsometer adds transmission measurement capability in addition to spectroscopic ellipsometry and multiple angle reflectometry. The FilmTek™ 2000SE spectroscopic ellipsometer utilizes SCI's material modeling software to provide an affordable and reliable thin film measurement tool for the simultaneous measurement of film thickness, refractive index, and extinction coefficient.
FilmTek™ 4000 is our most advanced model for thick film measurement applications. It incorporates multiple detectors positioned at different angles of incidence — plus our patented multi-angle Differential Power Spectral Density analysis capability — to accurately measure the index of refraction with a resolution of 0.00002. That's 100 times the performance of the best non-contact method, 10 times that of the best prism coupler contact systems. The FilmTek™ 4000 can measure birefringence of anisotropic materials. With its hot plate option, it can characterize the index of refraction and thermal expansion of a film as a function of temperature. And its spectroscopic ellipsometer option allows measurement of very thin films. A prime application for this system is measuring the index of refraction and thickness of planar waveguide films.
FilmTek™ CD is a cost effective solution for non-destructive optical CD metrology applications, accurately and simultaneously determining period, line width, trench depth, and sidewall angle. Based on technology combining multiple-angle polarized spectroscopic reflection and generalized spectroscopic ellipsometry, FilmTek™ CD measures Psi (y, y_sp, y_ps), Delta (D, D_sp, D_ps), R_s, R_p, R_sp, and R_psat 0 and 70 degrees to provide highly accurate measurements of profile information and film-thickness with a single tool. FilmTek™ CD can also be used to characterize biaxial (anisotropic) materials.
FilmTek™ 4000EM-DUV is our most advanced thin-film metrology system. It leverages the combination of new proprietary Multi-Angle Differential Polarimetry technology with SCI’s patented Differential Power Spectral Density technology to provide an optical thin film metrology tool with the best resolution, accuracy, and repeatability in the industry. The FilmTek™ 4000EM-DUV utilizes spectroscopic reflection (190nm-1700nm) of polarized light at multiple angles to independently measure film thickness and refractive index. By independently measuring refractive index and film thickness, the FilmTek™ 4000EM-DUV is far more sensitive to changes in films, particularly films within multi-layer stacks, than existing metrology tools that rely on conventional ellipsometry or reflectometry techniques. Additionally, the FilmTek™ 4000EM-DUV has a small measurement spot size to allow for measurement directly on product wafers (measures within a 50x50 micron feature). Optional generalized ellipsometry is available for anisotropy and optical CD measurement.

Reflectance and Power Spectral Density Analysis

Analysis of polyimide film coating a thermal oxide film grown on a silicon wafer.

Power Spectral Density analysis of

polyimide and oxide films.

FilmTek^TM 4000 High Precision Measurement of Refractive Index

This unique FilmTek™ 4000 capability employ’s our patented DPSD (Differential Power Spectral Density) technique. Spectroscopic reflection data are gathered at normal incidence and 70 degrees. PSD processing results in two peaks in the Power Spectral Density domain. The ratio of their positions is a function of the index of refraction of the film, and the angle of incidence of the oblique measurement. This ratio is used to calculate the index. Once the index is known, the thickness can be calculated from the optical thickness of the normal incident peak.

Differential Power Spectral Density analysis of an oxide film.

Index Map @ 1550nm of a doped oxide

measured with FilmTek™ 4000.

SiO₂ Film Properties vs Temperature

With the hot plate option, the FilmTek™ 4000 can characterize the index of refraction and thermal expansion of a film as a function of temperature.

Measured by FilmTek™ 4000 with heating chuck during one heat-cool cycle.

FilmTek^TM Surface Roughness Measurement

Fast, dependable, and non-contact, FilmTek™ measures surface roughness and damage with excellent correlation to other measurement techniques such as atomic force microscopy (AFM).

FilmTek™ 2000 vs AFM surface roughness measurement.

SCI Dispersion Model

Our dispersion model is derived from quantum mechanical principles and correctly obeys the Kramer-Kronig relationship. It is applicable to metallic, semiconductor, amorphous, crystalline, and dielectric materials. A broad array of single layer and multilayer films have been successfully analyzed, including:

• SiNx	• DLC
• SiOxNx	• Low K Dielectrics
• Polysilicon	• High K Dielectrics
• PSG	• Photoresist
• BPSG	• Polyimide
• ITO	• SOG
• a-Si	• Porous Films
• a-c:H	• Films used for manufacturing thin film heads

Substrate examples include:

• Silicon	• GaAs
• SOI	• Glass
• SOS	• Aluminum
• InP	• Ge

By employing a dispersion model covering the entire wavelength range of the measurement, the number of variables or parameters required to model optical response is reduced, eliminating the potential for multiple solutions.

FilmTek™ Spectroscopic Ellipsometer, Reflectometer, and Multiple Angle Reflectometer Configurations

We offer a variety of configurations and options to fit every need from R&D to high volume manufacturing in controlled environments.

They include:

Standard probe head (2 mm spot size)
Microscope based (down to 5 µm spot size)
Reflection mode measurements
Transmission mode measurements
Spectroscopic ellipsometry measurements
Automated stage
Cassette to cassette robotic transfer
SMIF box
Pattern recognition
Heating chuck
In-situ; for integration with process equipment
Windows based operating system
Menu-driven, user friendly software

SCI's products are offered in three categories; stand-alone FilmTek™ film metrology systems, film design and analysis software, and Integrated Metrology Modules. The latter is only offered to OEM companies on a project by project basis.