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Applications

FilmTek™ metrology systems can measure a broad array of single and multi-layer films including metallic, semiconductor, amorphous, crystalline, and dielectric materials on virtually any substrate.  FilmTek™ can simultaneously determine:

  • Multiple layer thicknesses (from <1Ĺ to 250 microns)
  • Indices of refraction [ n(l) ]  (both TE and TM components of index)
  • Extinction (absorption) coefficients [ k(l) ]
  • Birefringence (l)
  • Energy band gap [ Eg ]
  • Surface roughness and damage

  • Porosity, composition, and crystallinity (EMA model)

  • Film properties versus temperature
  • Wafer curvature and film stress

Optoelectronics Application Reports

Semiconductor Application Reports

Photovoltaic Application Reports

 

 Publications:  Peer Reviewed Papers Citing FilmTek™ Metrology Systems

  1. Si passivation for Ge pMOSFETs: Impact of Si cap growth conditions
    Solid-State Electronics, Volume 60, Issue 1, June 2011, Pages 116-121
     B. Vincent, R. Loo, W. Vandervorst, J. Delmotte, B. Douhard, V.K. Valev, M. Vanbel, T. Verbiest, J. Rip, B. Brijs, T. Conard, C. Claypool, S. Takeuchi, S. Zaima, J. Mitard, B. De Jaeger, J. Dekoster and M. Caymax
  2. On the properties and stability of thermally evaporated Ge–As–Se thin films
    Applied Physics A: Materials Science & Processing, Volume 96, Num 3, May 2011, Pages 615-625
     D. A. P. Bulla, R. P. Wang, A. Prasad, A. V. Rode, S. J. Madden and B. Luther-Davies
  3. Properties of AlN grown by plasma enhanced atomic layer deposition 
    Applied Surface Science, Article in Press, April 2011
     M. Bosund, T. Sajavaara, M. Laitinen, T. Huhtio, M. Putkonen, V.M. Airaksinen and H. Lipsanen
  4. Correlation Between Film Properties and Anhydrous HF Vapor Etching Behavior of Silicon Oxide Deposited by CVD Methods
     J. Electrochem. Soc., Volume 158, Issue 6, April 2011, pp. D399-D402
     H. Ritala, J. Kiihamäki, and E. Puukilainen
  5. Low temperature growth of nanocrystalline TiO2 films with Ar/O2 low-field helicon plasma
     Surface and Coatings Technology, Volume 205, Issue 15, April 2011, Pages 3939-3946
     C. Sarra-Bournet, C. Charles and R. Boswell
  6. Optical and structural properties of nanocrystalline anatase (TiO2) thin films prepared by non-aqueous sol-gel dip-coating
    Thin Solid Films, Article in Press, March 2011
     E. Haimi, H. Lipsonen, J. Larismaa, M. Kapulainen, J. Krzak-Ros and S.-P. Hannula
  7. Doped, porous iron oxide films and their optical functions and anodic photocurrents for solar water splitting
    Appl. Phys. Lett., Volume 98, January 2011, Page 092108
     C. X. Kronawitter, S. S. Mao, and B. R. Antoun
  8. Reactive ion etching of tellurite and chalcogenide waveguides using hydrogen, methane, and argon
     J. Vac. Sci. Technol. A, Volume 29, January 2011, Page 011023
     K. T. Vu and S. J. Madden
  9. Development of compatible wet-clean stripper for integration of CoWP metal cap in Cu/low-k interconnects
     Microelectronic Engineering, Volume 87, Issue 9, November 2010, Pages 1685-1688
     A. Wu, E. Baryschpolec, M. Rao, M. Schaller, C. Bartsch, S. Leppack and A. Ott
  10. Effect of deposition conditions and thermal annealing on the charge trapping properties of SiNx films
    Appl. Phys. Lett., Volume 97, November 2010, Page 202907
     Y. Ren, K. J. Weber, N. M. Nursam, and D. Wang
  11. Investigation of SiOxCy film as the encapsulation layer for full transparent OLED using hollow cathode discharge plasma at room temperature
     Thin Solid Films, Volume 518, Issue 22, September 2010, Pages 6195-6198
     K. C. Liu, H. L. Cheng, J. R. Tsai, Y. L. Chiang, Y. C. Hsieh and D. J. Jan
  12. Thin film absorbers for visible, near-infrared, and short-wavelength infrared spectra
    Sensors and Actuators A: Physical, Volume 162, Issue 2, August 2010, Pages 210-214
     M. Laamanen, M. Blomberg, R.L. Puurunen, A. Miranto and H. Kattelus 
  13. High quantum efficiency annular backside silicon photodiodes for reflectance pulse oximetry in wearable wireless body sensors
     J. Micromech. Microeng.,Volume 20, May 2010, Page 075020
     S. Duun, R. G. Haahr, O. Hansen, K. Birkelund and E. V. Thomsen
  14. Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators
     NATO Science for Peace and Security Series B: Physics and Biophysics , Part 3, 2010, Pages 157-165
     H. Ashraf, J. Hopkins and L. M. Lea
  15. Superhydrophilic TiO2 surface without photocatalytic activation
     Appl. Phys. Lett., Volume 96, March 2010, Page 093702
     V. Zorba, X. Chen, and S. S. Mao
  16. A Ring-Shaped Photodiode Designed for Use in a Reflectance Pulse Oximetry Sensor in Wireless Health Monitoring Applications
    Sensors Journal, IEEE, Volume 10, Issue 2, Feb 2010, Pages 261-268
     S.B. Duun, R.G. Haahr, K. Birkelund, E.V. Thomsen
  17. Photosensitive terpolymer for all-wet-etching process: Material characterization and device fabrication
     Thin Solid Films, Volume 518, Issue 8, February 2010, Pages 2147-2151
     A. Moujoud, S. Kang, H. J. Kim and M. Andrews
  18. n-Type TiO2 Thin Films for Electrochemical Ozone Production
     J. Electrochem. Soc., Volume 157, Issue 2, December 2009, pp. F30-F34
     K. Kitsuka, K. Kaneda, M. Ikematsu, M. Iseki, K. Mushiake, and T. Ohsaka
  19. Heteroepitaxial sputtered Ge on Si (100): Nanostructure and interface morphology
     Europhysics Letters, Volume 88, Number 2, November 2009, Page 28005
     S. M. Pietralunga, M. Feré, M. Lanata, D. Piccinin, G. Radnóczi, F. Misják, A. Lamperti, M. Martinelli and P. M. Ossi
  20. Optical properties of transparent barium titanate nanoparticle/polymer hybrid synthesized from metal alkoxides
     Journal of Nanoparticle Research, Volume 12, Number 5, September 2009, pages 1933-1943
     K. Mimura, K. Hiramatsu, M. Moriya, W. Sakamoto, S. Kawado, Y. Uesu and T. Yogo
  21. Observations on the influence of pH control on the properties of chemically deposited CdS films in an ammonia-free system
     Journal of Physics and Chemistry of Solids, Volume 70, Issue 6, June 2009, Pages 1034-1041
     R. Ochoa-Landín, M.G. Sandoval-Paz, M.B. Ortuńo-López, M. Sotelo-Lerma and R. Ramírez-Bon
  22. A simple sol–gel route to ZrO2 films with high optical performances
     Materials Chemistry and Physics, Volume 114, Issue 1, 15 March 2009, Pages 252-256
     L. Liang, Y. Xu, D. Wu and Y. Sun
  23. Comparison of the optical and structural properties of nickel oxide-based thin films obtained by chemical bath and sputtering
    Thin Solid Films, Volume 517, Issue 10, 31 March 2009, Pages 3115-3120
    A. Mendoza-Galván, M.A. Vidales-Hurtado, A.M. López-Beltrán  
  24. Thermal patterning of amorphous fluoropolymer layers
    Sensors and Actuators A: Physical, Volume 148, Issue 1, 4 November 2008, Pages 111-114
    Ming-Tsung Hung, Y. Sungtaek Ju  
  25. Electrochromism in nickel oxide-based thin films obtained by chemical bath deposition
    Solid State Ionics, Volume 179, Issues 35-36, 30 October 2008, Pages 2065-2068
    M.A. Vidales-Hurtado, A. Mendoza-Galván  
  26. Optical and structural properties of pulsed laser deposited Ti:Al2O3 thin films
    Solar Energy Materials and Solar Cells, Volume 92, Issue 9, September 2008, Pages 1025-1029
    Bo Chen, Dongfang Yang, Paul A. Charpentier, Suwas Nikumb
  27. Studies on polymeric nanofiltration-based water softening and the effect of anion properties on the softening process
    European Polymer Journal, Volume 44, Issue 7, July 2008, Pages 2244-2252
    Alexander R. Anim-Mensah, William Bill Krantz, Rakesh Govind
  28. High etch selectivity for plasma etching SiO2 with AlN and Al2O3 masks
    Microelectronic Engineering, Volume 85, Issues 5-6, May-June 2008, Pages 985-987
    K. Kolari  
  29. Design, fabrication and characterization of a Far-field Superlens
    Solid State Communications, Volume 146, Issues 5-6, May 2008, Pages 202-207
    Hyesog Lee, Zhaowei Liu, Yi Xiong, Cheng Sun, Xiang Zhang  
  30. Chalcogenide glass photonic crystals
    Photonics and Nanostructures - Fundamentals and Applications, Volume 6, Issue 1, April 2008, Pages 3-11
    Darren Freeman, Christian Grillet, Michael W. Lee, Cameron L.C. Smith, Yinlan Ruan, Andrei Rode, Maryla Krolikowska, Snjezana Tomljenovic-Hanic, C.Martijn de Sterke, Michael J. Steel, Barry Luther-Davies, Steve Madden, David J. Moss, Yong-Hee Lee, Benjamin J. Eggleton
  31. Optical and structural characterization of nickel oxide-based thin films obtained by chemical bath deposition
    Materials Chemistry and Physics, Volume 107, Issue 1, 15 January 2008, Pages 33-38
    M.A. Vidales-Hurtado, A. Mendoza-Galván 
  32. Morphological and chemical study of the initial growth of CdS thin films deposited using an ammonia-free chemical process
    Applied Surface Science, Volume 254, Issue 2, 15 November 2007, Pages 499-505
    D.A. Mazón-Montijo, M. Sotelo-Lerma, M. Quevedo-López, M. El-Bouanani, H.N. Alshareef, F.J. Espinoza-Beltrán, R. Ramírez-Bon
  33. Production and transport chemistry of atomic fluorine in remote plasma source and cylindrical reaction chamber
    Journal of Physics D: Applied Physics, Volume 40, Issue 17, September 2007, Pages 5140-5154
    Gangly, S. P.; Johnson, A. D.; Fridman, A. A.; Pearce, R. V.; Gutsol, A. F.; Dolgopolsky, A
  34. Control of emission outcoupling in liquid-crystalline fluorescent polymer films
    Organic Electronics, Volume 8, Issue 4, August 2007, Pages 317-324
    Tae-Woo Lee, O Ok Park, Young Chul Kim
  35. Enhancement of photoluminescence from excitons in silicon nanocrystals via coupling to surface plasmon polaritons
    Journal of Applied Physics, Volume 102, July 2007, Page 023506
    Eiji Takeda, Minoru Fujii,     Toshihiro Nakamura, Yugo Mochizuki, and Shinji Hayashi
  36. Effects of Ge addition on the optical and electrical properties of eutectic Sb70Te30 films
    Journal of Non-Crystalline Solids, Volume 353, Issues 18-21, 15 June 2007, Pages 1870-1874
    E. Prokhorov, A. Mendoza-Galván, J. González-Hernández, B. Chao
  37. Thin film deposition of Ge33As12Se55 by pulsed laser deposition and thermal evaporation: Comparison of properties
    Journal of Non-Crystalline Solids, Volume 353, Issues 8-10, 15 April 2007, Pages 947-949
    R.A. Jarvis, R.P. Wang, A.V. Rode, C. Zha, B. Luther-Davies
  38. Structural relaxation and optical properties in amorphous Ge33As12Se55 films
    Journal of Non-Crystalline Solids, Volume 353, Issues 8-10, 15 April 2007, Pages 950-952
    R.P. Wang, A.V. Rode, S.J. Madden, C.J. Zha, R.A. Jarvis, B. Luther-Davies
  39. The influence of surfactants on the roughness of titania sol–gel films
    Materials Characterization, Volume 58, Issue 3, March 2007, Pages 233-242
    Jorge Medina-Valtierra, Claudio Frausto-Reyes, Sergio Calixto, Pedro Bosch, Victor Hugo Lara
  40. Improved surface sensing of DNA on gas-etched porous silicon
    Sensors and Actuators B: Chemical, Volume 120, Issue 1, 14 December 2006, Pages 220-230
    D.C. Tessier, S. Boughaba, M. Arbour, P. Roos, G. Pan 
  41. Design of a thin film for optical applications, consisting of high and low refractive index multilayers, fabricated by a layer-by-layer self-assembly method
    Colloids and Surfaces A: Physicochemical and Engineering Aspects, Volumes 284-285, 15 August 2006, Pages 290-294
    Jin-Ho Kim, Shiro Fujita, Seimei Shiratori
  42. Orientation dependent ferroelectric properties in samarium doped bismuth titanate thin films grown by the pulsed-laser-ablation method
    Applied Physics Letters, Volume 89, July 2006, Page 032901
    Cheng, Zhenxiang; Kannan, Chinna Venkatasamy; Ozawa, Kiyoshi; Kimura, Hideo; Wang, Xiaolin
  43. Microstructure analysis of a-SiC:H thin films grown by high-growth-rate PECVD
    Journal of Non-Crystalline Solids, Volume 352, Issues 9-20, 15 June 2006, Pages 1380-1383
    C. Ricciardi, A. Primiceli, G. Germani, A. Rusconi, F. Giorgis  
  44. Impact of pore size and morphology of porous organosilicate glasses on integrated circuit manufacturing
    O Neill, Mark L.; Haas, Mary K.; Peterson, Brian K.; Vrtis, Raymond N.; Weigel, Scott J.; Wu, Dingjun; Bitner, Mark D.; Karwacki, Eugene J.
    Materials, Technology and Reliability of Low-k Dielectrics and Copper Interconnects Proceedings of Symposium F held at the 2006 MRS Spring Meeting, Vol. 914, 2006, Pages 3-14
  45. DC magnetron sputtering of Si to form SiO2 in low-energy ion beam
    Vacuum, Volume 80, Issue 7, 31 May 2006, Pages 693-697
    Cheng-Chung Lee, Der-Jun Jan
  46. Fabrication and characterization of TiO2 thin film prepared by a layer-by-layer self-assembly method
    Thin Solid Films, Volume 499, Issues 1-2, 21 March 2006, Pages 83-89
    Jin-Ho Kim, Shiro Fujita, Seimei Shiratori    
  47. Preparation and characterization of pulsed laser deposition (PLD) SiC films
    Applied Surface Science, Volume 252, Issue 10, 15 March 2006, Pages 3386-3389
    Y.H. Tang, T.-K. Sham, D. Yang, L. Xue  
  48. The photocatalytic application and regeneration of anatase thin films with embedded commercial TiO2 particles deposited on glass microrods
    Applied Surface Science, Volume 252, Issue 10, 15 March 2006, Pages 3600-3608
    Jorge Medina-Valtierra, Josafat García-Servín, Claudio Frausto-Reyes, Sergio Calixto  
  49. Heat, moisture and chemical resistance on low dielectric constant (low-k) film using Diethoxymethylsilane (DEMS) prepared by plasma enhanced chemical vapor deposition
    Surface and Coatings Technology, Volume 200, Issue 10, 24 February 2006, Pages 3127-3133
    Y.L. Cheng, Y.L. Wang, J.K. Lan, G.J. Hwang, M.L. O'Neil, C.F. Chen
  50. Fabrication of porous silicon using a gas etching method
    Thin Solid Films, Volume 497, Issues 1-2, 21 February 2006, Pages 83-89
    S. Boughaba, K. Wang  
  51. Structures and electrochromic properties of Ta0.3W0.7Ox thin films deposited by pulsed laser ablation
    Thin Solid Films, Volume 494, Issues 1-2, 3 January 2006, Pages 28-32
    D. Yang, L. Xue  
  52. Realization of optical superlens imaging below the diffraction limit
     New Journal of Physics, Volume 7, December 2005, Page 255
    Hyesog Lee, Yi Xiong, Nicholas Fang, Werayut Srituravanich, Stephane Durant, Muralidhar Ambati, Cheng Sun, and Xiang Zhang
  53. Dry-etched silicon-on-insulator waveguides with low propagation and fiber-coupling losses
     Journal of Lightwave Technology, Volume 23, No. 11, November 2005, Pages 3875–3880
    Kimmo Solehmainen, Timo Aalto, James Dekker, Markku Kapulainen, Mikko Harjanne, Kaupo Kukli, Päivi Heimala, Kai Kolari, and Markku Leskelä
  54. Global photonic efficiency for phenol degradation and mineralization in heterogeneous photocatalysis
    Journal of Photochemistry and Photobiology A: Chemistry, Volume 174, Issue 3, 1 September 2005, Pages 246-252
    Jorge Medina-Valtierra, Edgar Moctezuma, Manuel Sánchez-Cárdenas, Claudio Frausto-Reyes  
  55. Wavelength dispersion of Verdet constants in chalcogenide glasses for magneto-optical waveguide devices
     Optics Communications, Volume 252, Issues 1-3, 1 August 2005, Pages 39-45
    Yinlan Ruan, Ruth A. Jarvis, Andrei V. Rode, Steve Madden, Barry Luther-Davies
  56. Tantalum(V) Nitride Inverse Opals as Photonic Structures for Visible Wavelengths
     Journal of Physical Chemistry B, Volume 109 (9), 2005, Pages 3764–3771
      Alessandro Rugge, Jin-Seong Park, Roy G. Gordon, and Sarah H. Tolbert
  57. Effects of Nd substitution on the polarization properties and electronic structures of bismuth titanate single crystals
    Materials Research Bulletin, Volume 40, Issue 6, 15 June 2005, Pages 1044-1051
    Takashi Goto, Yuji Noguchi, Masayuki Soga, Masaru Miyayama
  58. Organic–inorganic hybrid coating (poly(methyl methacrylate)/monodisperse silica)
    Optical Materials, Volume 27, Issue 7, April 2005, Pages 1266-1269
    E. Rubio, J. Almaral, R. Ramı́rez-Bon, V. Castańo, V. Rodrı́guez 
  59. Structures and electrochromic properties of Ta0.1W0.9Ox thin films deposited by pulsed laser ablation
    Thin Solid Films, Volumes 469-470, 22 December 2004, Pages 54-58
    D. Yang, L. Xue  
  60. Fabrication of pure silica films for planar optical waveguides using colloidal suspensions
    Journal of Non-Crystalline Solids, Volume 342, Issues 1-3, 15 August 2004, Pages 18-24
    Deok-Yang Kim, Glen R. Kowach, David W. Johnson Jr., Suhas Bhandarkar, Henry Du
  61. Formation of copper oxide films on fiberglass by adsorption and reaction of cuprous ions
    Thin Solid Films, Volume 460, Issues 1-2, 22 July 2004, Pages 58-61
    Jorge Medina-Valtierra, Sergio Calixto, Facundo Ruiz
  62. Deposition of nitrogen-containing diamond-like carbon films on acrylic substrates by an ion beam process
    Vacuum, Volume 74, Issues 3-4, 7 June 2004, Pages 531-538
    D.-J.Der-Jun Jan, Chi-Fong Ai, Cheng-Chung Lee 
  63. Moisture resistance and thermal stability of fluorine-incorporation siloxane-based low-dielectric-constant material
    Thin Solid Films, Volumes 447-448, 30 January 2004, Pages 681-687
    Y. L. Cheng, Y. L. Wang, Y. L. Wu, C. P. Liu, C. W. Liu, J. K. Lan, M. L. O'Neil, Chyung Ay, M. S. Feng 
  64. Cyclohexane oxidation over Cu2O–CuO and CuO thin films deposited by CVD process on fiberglass
    Applied Catalysis A: General, Volume 238, Issue 1, 8 January 2003, Pages 1-9
    Jorge Medina-Valtierra, Jorge Ramı́rez-Ortiz, Victor M Arroyo-Rojas, Facundo Ruiz 
  65. Synthesis of amorphous silicon carbonitride films by pulsed laser deposition
    Thin Solid Films, Volume 402, Issues 1-2, 1 January 2002, Pages 99-110
    S. Boughaba, G. I. Sproule, J. P. McCaffrey, M. Islam, M. J. Graham
  66. Ultrathin Ta2O5 films produced by large-area pulsed laser deposition
    Thin Solid Films, Volume 371, Issues 1-2, 1 August 2000, Pages 119-125
    S. Boughaba, M. Islam, J. P. McCaffrey, G. I. Sproule, M. J. Graham
  67. Synthesis of tantalum pentoxide films by pulsed laser deposition: material characterization and scale-up
    Thin Solid Films, Volume 358, Issues 1-2, 10 January 2000, Pages 104-113
    S. Boughaba, G. I. Sproule, J. P. McCaffrey, M. Islam, M. J. Graham
  68. Characterization of tantalum oxide films grown by pulsed laser deposition
    Surface and Coatings Technology, Volumes 120-121, November 1999, Pages 757-764
    S. Boughaba, M. U. Islam, G. I. Sproule, M. J. Graham

 

 

    

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